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ARC-lite

Antireflective coating system for backside analysis

ARC-lite is the world's first system to offer fast, reliable, room temperature AR coatings on package and wafer level devices. ARC-lite is used as a free-standing unit for AR coating polished backside surfaces. The sample produced are optimized and require no baking.

ARC-lite reaches maximum functionality when used with the ASAP-1 Selected Area Preparation System -- The ARC-lite sample mounting plate can be conveniently transferred between ARC-lite and ASAP-1

Advanced Imaging Fluids

Two proprietary imaging fluids provide ARC-lite users with optimized backside imaging. The standard "EMMI" fluid has been recently joined by a new "FIB FRIENDLY" fluid that offers improved temperature stability, to allow backside modifications to be carried out on AR coated parts.  

SAP Product Line Brochure

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Product Highlights

  • Fast and convenient - 45 second process
  • Up to 30% more transmitted photon efficiency
  • Up to 60% improved contrast under NIR
  • Inexpensive to own and operate
  • Bench-top, quiet, room temp. process
  • All package types and sizes
  • RC can be done ‘in-house’ - NO BAKING
  • Assists and optimizes emission microscopy, Laser, FIB, voltage, thermal, FMI, probing, and most other backside techniques

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Antireflective coating offers optimized backside imaging

ARC-lite provides a rapid, easy-to-apply and effective coating for improving backside imaging on thinned and polished semiconductor substrates. By applying a few drops of ARC-lite Imaging fluid and a short 45 second...