ASAP-1 Selected Area Preparation System
| BACKSIDE
PREPARATION & POLISHING / MECHANICAL DECAPSULATION
Every lab can now produce accurate, reproducible, thinned and perfectly polished dice for backside analysis. Flip-chip and power chip mechanical decap. is now straightforward and accurate.
Thinned and polished die in a PQFP package, backside imaged using an Emission Microscope with NIR Illumination, with 20X objective. The die, whether in packaged or wafer form, is mounted on a specially designed traveling table oscillates in the X and Y directions A rotating tool, controlled in the Z-Direction, means reproducible grinding can be carried out to a specific thickness (routinely to less than 50mm of remaining silicon), finishing with a scratch-free mirror polish. This yields a surface ready for NIR imaging and backside analysis. By changing tools, in conjunction with loose or fixed abrasives, a scratch-free surface is produced. Heating of the substrate is minimal during processing due to the low damage nature of the process.
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Products On-line Resource Page
>> Click here for Selected Area Preparation Product Brochure( PDF) >>Click here for more about ASAP-1 Optical Upgrade >> Find out more about ARC-lite AR coating system
Product highlights
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Emission site (yellow) shown by forward bias through an input pin, imaged with backside illumination with 20x objective
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