ULTRASPEC- III

Multi-line Laser Illuminator for Semiconductor Backside Analysis

Our patented ULTRASPEC-III coherent laser illumination source is designed to meet the needs of today’s photoemission microscopes as well as backside imaging stations.

In standard configuration with laser wavelengths at 660nm, 1064nm and 1300nm, you have the immediate flexibility to illuminate just the topside or silicon surface and then switch to 1064nm (or 1300nm if you have a longer wavelength sensitive camera) for crisp high contrast backside imaging. Produces superior backside images through the silicon with phase-blended laser illumination.

Unmatched backside imaging

You wouldn’t limit your expensive emission microscope with improper optics so why limit it with improper illumination?

Note how the monochromatic source brings out diffraction limited details in the backside image (lower image). 

The system gives no chromatic aberration and is compatible with many oil immersion objectives.

BACKSIDE IMAGE ILLUMINATED WITH STANDARD BULB ILLUMINATOR

 

SAME AREA OF PART WITH ULTRASPEC-III LASER ILLUMINATOR

 

ULTRASPEC-III can also be used to extend the application of other manufacturers' microscopes. Ask for details

 

ULTRASPEC-III  is sold under license from Jim Colvin Consulting Services and is protected under US Patents -  # 6112004  & 6134365

#6134365

Resources

>> Click here for Datasheet in PDF format

>> Find out more about ASAP-1

>> Find out more about INFRATEC-1

>> Find out more about ARC-lite

>> Other Resources

 

Product Highlights

Vastly improved imaging over conventional and competitive methods

Bench-top and quiet

Three laser lines can be used independently or blended

Suits most backside microscopes on the market   

Assists and optimizes emission microscopy, Laser, FIB, voltage, thermal, FMI, probing, and most other backside techniques

Ordering Information

Order Code Item
  ULTRASPEC-III 3 laser line coherent illumination system
  Fiber Cable
   

 

 

Main| |Equipment| |Consumables| |Notes & Articles| |What's New| |Inquiry Form|

 

1025 E. Chestnut Ave.
Santa Ana, CA 92701-6425
Toll Free (US): 1 877 542 0609

Tel: (714) 542-0608
Fax: (714) 542-0627
Email:
info@ultratecusa.com