ULTRASPEC- III
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Laser Illuminator for Semiconductor Backside Analysis
Our patented ULTRASPEC-III coherent laser illumination source is designed to meet the needs of today’s photoemission microscopes as well as backside imaging stations. In standard configuration with laser wavelengths at 660nm, 1064nm and 1300nm, you have the immediate flexibility to illuminate just the topside or silicon surface and then switch to 1064nm (or 1300nm if you have a longer wavelength sensitive camera) for crisp high contrast backside imaging. Produces superior backside images through the silicon with phase-blended laser illumination. Unmatched backside imagingYou wouldn’t limit your expensive emission microscope with improper optics so why limit it with improper illumination? Note how the monochromatic source brings out diffraction limited details in the backside image (lower image). The system gives no chromatic aberration and is compatible with many oil immersion objectives.
BACKSIDE IMAGE ILLUMINATED WITH STANDARD BULB ILLUMINATOR
SAME AREA OF PART WITH ULTRASPEC-III LASER ILLUMINATOR
ULTRASPEC-III can also be used to extend the application of other manufacturers' microscopes. Ask for details
ULTRASPEC-III is sold under license from Jim Colvin Consulting Services and is protected under US Patents - # 6112004 & 6134365
#6134365
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| Resources
>> Click here for Datasheet in PDF format >> Find out more about INFRATEC-1 >> Find out more about ARC-lite
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