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ICis Microscope

Materials Inspection System

ICis is a modular microscope offering up to 3 standard modes, often required by professionals in the electronics and related industries. The system is designed to be a primary tool for the engineer or technician working at a nearby polishing station. ICis allows for fast substrate thickness measurements of backside thinned and polished samples; it is also invaluable for fast imaging and archiving of die samples being parallel polished / de-processed. 

The system accepts ULTRA TEC's ASAP-1®  sample mounting plates and ULTRAPOL Advance quick release sample holders.

Three Imaging Modes are available -- NIR as standard, with options for UV and high res visible.  The ICis' Custom software includes imaging, image optimization, annotation, Silicon Thickness measurement, navigation and archival functions.

Key applications of ICis are in Imaging topside x-section & backside electronic polished samples. ICis is an invaluable tool for validation of polished surface quality and for assessing de-processing position.

 

Further Reading

Resolving Power Comparisons

 

UV– Highest Resolving Power. Bridges the gap
between optical microscopy and SEMIntegrated Microscopy Suite
with 3 Advanced Imaging

 

UV– Highest Resolving Power. Bridges the gap
between optical microscopy and SEM

Click Additional Images to Enlarge








Product Highlights

  • Three Modes Available -- NIR as Standard, with options for UV and high res visible
  • Custom software includes imaging, image optimization,annotation, Silicon Thickness measurement, navigation and archival functions.
  • Images topside x-section & backside electronic polished samples
  • For validation of polished surface quality and for assessing de-processing position 

 


Order Code

Item

Description

6425.1-IR

ICis NIR Microscope

MICROSCOPE with optimized tube, Motorized ‘Z Direction’ Focus Block
Bench-top Stand, X-Y Table, large enough to accept standard ASAP-1 sample holder plates, NIR optimized un-cooled Inspection Camera, Desktop Microcomputer, running Windows XP, mouse keyboard, 19” min monitor, ICis Custom Sofware that provides image capture, optimization, annotation, silion thickness measurement, and archival functions, Power Cord, Sample holder plate

 6426.UV

UV Camera

UV Illumination Pod with filter and UV Source controller – Upgrade

6427.VIS

Visible / Color Camera

Color Mega-pixel Camera, USB, with software – Upgrade

6428.XY

Motorized X-Y Table

Motorized X-Y Table for Main ICis unit, with nano-step controller – allows mouse control of X, Y and Z directions - Upgrade

 

Objective Lenses

Order Code Description

6405.1

5 x Objective Lens Visible / NIR (WD=40.0mm / NA=0.15)

6465.1

50x Objective lens Visible /NIR (WD = 18.3mm / NA = 0.45)

6410.IR

100x Objective  lens, plan, optimized for NIR

6462.1

2.5X Objective Lens for Visible / UV

6410.1

100x Objective lens plan for Visible / UV

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