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ICis Microscope
Materials Inspection System
ICis is a modular microscope offering up to 3 standard modes, often required by professionals in the electronics and related industries. The system is designed to be a primary tool for the engineer or technician working at a nearby polishing station. ICis allows for fast substrate thickness measurements of backside thinned and polished samples; it is also invaluable for fast imaging and archiving of die samples being parallel polished / de-processed.
The system accepts ULTRA TEC's ASAP-1® sample mounting plates and ULTRAPOL Advance quick release sample holders.
Three Imaging Modes are available -- NIR as standard, with options for UV and high res visible. The ICis' Custom software includes imaging, image optimization, annotation, Silicon Thickness measurement, navigation and archival functions.
Key applications of ICis are in Imaging topside x-section & backside electronic polished samples. ICis is an invaluable tool for validation of polished surface quality and for assessing de-processing position.
Further Reading
UV– Highest Resolving Power. Bridges the gap
between optical microscopy and SEMIntegrated Microscopy Suite
with 3 Advanced Imaging
UV– Highest Resolving Power. Bridges the gap
between optical microscopy and SEM
Click Additional Images to Enlarge
Product Highlights
- Three Modes Available -- NIR as Standard, with options for UV and high res visible
- Custom software includes imaging, image optimization,annotation, Silicon Thickness measurement, navigation and archival functions.
- Images topside x-section & backside electronic polished samples
- For validation of polished surface quality and for assessing de-processing position
|
Order Code |
Item |
Description |
|---|---|---|
|
6425.1-IR |
ICis NIR Microscope |
MICROSCOPE with optimized tube, Motorized ‘Z Direction’ Focus Block |
|
6426.UV |
UV Camera |
UV Illumination Pod with filter and UV Source controller – Upgrade |
|
6427.VIS |
Visible / Color Camera |
Color Mega-pixel Camera, USB, with software – Upgrade |
|
6428.XY |
Motorized X-Y Table |
Motorized X-Y Table for Main ICis unit, with nano-step controller – allows mouse control of X, Y and Z directions - Upgrade |
Objective Lenses
| Order Code | Description |
|---|---|
|
6405.1 |
5 x Objective Lens Visible / NIR (WD=40.0mm / NA=0.15) |
|
6465.1 |
50x Objective lens Visible /NIR (WD = 18.3mm / NA = 0.45) |
|
6410.IR |
100x Objective lens, plan, optimized for NIR |
|
6462.1 |
2.5X Objective Lens for Visible / UV |
|
6410.1 |
100x Objective lens plan for Visible / UV |
